Temescal
CV-6S
The Temescal CV-6S is an electron-beam evaporation system. The Temescal CV-6S is configured with a load-lock, dual 4-pocket e-beam sources, and a CV-6S 10 kV power supply. The Temescal CV-6S supports one wafer up to 4 inches in diameter.[1][2]
How it works
The CV-6S electron beam power supply is a constant-voltage, 6 kW high-frequency switching power supply designed to power and control one or two electron-beam sources simultaneously. The CV-6S power supply is compatible with sources using either permanent-magnet or electromagnet deflection. Voltage and current are regulated to plus or minus 0.5 percent by a high-frequency switching inverter using insulated-gate bipolar transistor technology. The CV-6S power supply also provides instantaneous arc-down recovery.[3][4]
Where it fits in the process flow
The UCSB Temescal system accepts one wafer up to 4 inches in diameter or multiple pieces. The UCSB Temescal system can use a tiltable sample holder for normal-incidence evaporation in lift-off work. The UCSB Temescal system has both crucibles offset from directly below the sample holder, so deposition with the standard flat holder arrives at about a 20 degree angle depending on the gun used.[2]
Applications
The UCSB Temescal system is used for n-type ohmic contact metallization to compound semiconductors, Schottky contacts to semiconductors, bond pads, and other general metallizations. The UCSB Temescal system has a maximum deposition thickness per run of 1 micron. The UCSB Temescal system is configured with front-gun materials Ti, Pt, Ni, and Au, and rear-gun materials Pd, Al, Ag, and Ge.[2]
- Metal deposition
- N-type ohmic contact metalization to compound semiconductors
- Schottky contacts to semiconductors
- Bond pads
- Other general metalizations
What do the numbers mean?
Power & electrical8
Vacuum & pumping4
Wafer handling2
Optics & imaging1
- Operating capability
- Designed to power and control one or two electron beam sources simultaneously[3]
Control & software1
Configuration & options8
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| CV-6S | — | — | Base model documented as a 6 kW electron beam power supply; sources also list 208 V, 240 V, 380 V, 415 V, and 480 V input versions. | web.archive.org[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power supply10 kV[2]
- Base pressure~ 5e-7 ultimate base pressure[2]
- Vacuum systemCryo-pumped system[2]
- Vacuum sequencingAutomatic vacuum sequencing[2]
- Power supply typeConstant voltage, 6 kW high frequency switching power supply[3]
- Voltage/current regulation+/- 0.5%[3]
- Included componentsPower module, high-voltage/gun control unit, filament transformer, 20 ft. cable set, operator manual[3]
- Tool typeVacuum Deposition[2]
- Power supplyCV-6S 10 kV power supply[2]
- Input power versions208 V, 240 V, 380 V, 415 V, and 480 V input versions[1]
- Power supply rating6 kW high frequency switching power supply[3]
- Power supply functionDesigned to power and control one or two electron beam sources simultaneously[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the CV-6S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CV-6S are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the CV-6S are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CV-6S are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CV-6S is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the CV-6S are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]CV-6S Electron Beam Power Supply — semiconductoronline.comsemiconductoronline.com
Last updated Oct 17, 2026.
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