Temescal

CV-6S

Deposition 4"Temescal CV-6S family

Research Quality: 40% complete

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CV-6S — web.archive.org — Fig. 01CV-6Sweb.archive.org^[1]

Wafer size

Power

10 kV^[2]

Vacuum

~ 5e-7 ultimate base pressure^[2]

What is it?

The sources describe the Temescal CV-6S in a vacuum deposition context as an electron-beam evaporation system. It is shown as a load-locked metal evaporator with dual gun capability, and the detailed specifications list a 10 kV power supply, two Temescal 4-pocket series 260 e-beam sources, cryo-pumped operation, load-lock, automatic vacuum sequencing, a Super Sweep e-beam sweep controller, and an Inficon IC/5 thickness monitor. The UCSB source states sample size as one wafer up to 4 inches in diameter and notes use for metal deposition applications including contacts and bond pads.

What can it run?

Process applications and technology nodes documented for this tool.

Metal deposition
N-type ohmic contact metalization to compound semiconductors
Schottky contacts to semiconductors
Bond pads
Other general metalizations

What do the numbers mean?

Power & electrical4

Power supply: 10 kV^[2]
Power supply type: Constant voltage, 6 kW high frequency switching power supply^[1]
Voltage/current regulation: +/- 0.5%^[1]
Included components: Power module, high-voltage/gun control unit, filament transformer, 20 ft. cable set, operator manual^[1]

Vacuum & pumping3

Base pressure: ~ 5e-7 ultimate base pressure^[2]
Vacuum system: Cryo-pumped system^[2]
Vacuum sequencing: Automatic vacuum sequencing^[2]

Wafer handling2

Description: Load Locked Metal Evaporator Dual Gun^[2]
Sample size: 1 wafer up to 4" diameter^[2]

Optics & imaging1

Operating capability: Designed to power and control one or two electron beam sources simultaneously^[1]

Control & software1

Beam sweep control: Temescal Super Sweep e-beam sweep control^[2]

Configuration & options7

Manufacturer: Temescal^[2]
Model: CV-6S^[2]
E-beam sources: 2 Temescal 4-pocket series 260 e-beam sources^[2]
Load-lock: Present for quick turn-around^[2]
Thickness monitoring: Inficon IC/5 programmable crystal thickness monitoring system^[2]
Metals, front gun: Ti, Pt, Ni, Au^[2]
Metals, rear gun: Pd, Al, Ag, Ge^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
CV-6S	—	—	Base model documented as a 6 kW electron beam power supply; sources also list 208 V, 240 V, 380 V, 415 V, and 480 V input versions.	web.archive.org^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power supply10 kV^[2]
Base pressure~ 5e-7 ultimate base pressure^[2]
Vacuum systemCryo-pumped system^[2]
Vacuum sequencingAutomatic vacuum sequencing^[2]
Power supply typeConstant voltage, 6 kW high frequency switching power supply^[1]
Voltage/current regulation+/- 0.5%^[1]
Included componentsPower module, high-voltage/gun control unit, filament transformer, 20 ft. cable set, operator manual^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the CV-6S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CV-6S are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the CV-6S are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CV-6S are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CV-6S is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the CV-6S are on record.
Answerable by: an OEM parts catalog or a service engineer