Temescal FC-2000

Models in this family

1. 

   FC-2000

   The Temescal FC-2000 is a load-locked bell jar deposition system for small-scale production and R&D, with listed substrate fixtures for 2-inch, 3-inch, 100-mm, and 150-mm wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   BJD-2000	—	—	Non-load-locked version of the FC/BJD-2000 line.	web.archive.org[1]
   FC-2000	—	—	Fast-cycle, load-locked version that allows the source to remain under vacuum during substrate reloading.	web.archive.org[1]
   FC-2800	—	—	The sources state that a field upgrade kit allows conversion into an FC-2800.	web.archive.org[1]
   BCD-2800	—	—	The sources state that a field upgrade kit allows conversion into a BCD-2800.	web.archive.org[1]

Sources