Temescal
FC-2000
The Temescal FC-2000 is a bell jar deposition system. The Temescal FC-2000 is a load-locked evaporation system. The Temescal FC-2000 supports 13x100mm wafers.[1][2][3]
Plate 01Temescal FC2000 Inv# 64,981 Egun Deposition
Bid ServicellcWatch on YouTubePlate 02Temescal FC2000 Inv# 64,981 Thermal Source Deposition
Bid ServicellcWatch on YouTube
Wafer size
100mm
Power
10 kV SIMBA 2 HV supply, max 15 kW[3]
What it is
General reference — not yet source-verifiedDeposition systems of this class are vacuum evaporation tools used to form thin films on substrates. Bell jar evaporators are typically used where process flexibility, source access, and a relatively direct line of sight between source and substrate are important.
Where it fits in the process flow
General reference — not yet source-verifiedEvaporation tools of this class are used in thin-film module areas after substrate preparation and before pattern transfer completion, liftoff, packaging, or additional film stack steps. Such tools commonly sit alongside sputter and other deposition methods when a process flow calls for directional coating, multilayer metal stacks, or materials suited to evaporation.
Applications
General reference — not yet source-verifiedMachines in this class are commonly used to deposit conductive, adhesion, barrier, and noble metal films on wafers and small substrates. Electron beam evaporation is often selected for lift-off patterning and other applications where directional flux and low process gas involvement are useful.
- Small-scale production
- Research and development
What do the numbers mean?
Power & electrical2
Vacuum & pumping3
Wafer handling9
Optics & imaging2
Control & software3
Configuration & options11
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| BJD-2000 | — | — | Non-load-locked version of the FC/BJD-2000 line. | web.archive.org[1] |
| FC-2000 | — | — | Fast-cycle, load-locked version that allows the source to remain under vacuum during substrate reloading. | web.archive.org[1] |
| FC-2800 | — | — | The sources state that a field upgrade kit allows conversion into an FC-2800. | web.archive.org[1] |
| BCD-2800 | — | — | The sources state that a field upgrade kit allows conversion into a BCD-2800. | web.archive.org[1] |
What replaced it?
Related models
- siblingTemescal FC-2800— Listed in the product quickfinder alongside FC-2800.source[4]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum handlingAllows the source to remain under vacuum during substrate reloading[1]
- Electron beam power supplyTemescal model CV-6SLX electron beam power supply[1]
- Source behavior during reloadAllows the source to remain under vacuum during substrate reloading[1]
- Power supply10 kV SIMBA 2 HV supply, max 15 kW[3]
- Substrate reload behaviorAllows the source to remain under vacuum during substrate reloading[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What source-to-substrate distances are available on the Temescal FC-2000?
The Temescal FC-2000 has a standard source-to-substrate distance of 19.5 inches. The Temescal FC-2000 can be configured with an optional source well extension collar for a 27.5 inch source-to-substrate distance.[1][2]
What control system does the Temescal FC-2000 use?
The Temescal FC-2000 uses the Temescal Control System. The Temescal Control System provides recipe-driven process and vacuum control, process variable monitoring, process and historical trend tracking, and process data logging. The Temescal Control System operates in Auto, Manual, and Service modes.[1][2]
What source hardware can the Temescal FC-2000 support?
The Temescal FC-2000 source tray supports multiple electron beam and resistance sources. The Temescal FC-2000 can be equipped with a Temescal 4- or 6-pocket standard or PopTop turret source. The Temescal FC-2000 also offers options for up to three resistance sources and one additional fixed electron beam source.[1][2]
Not publicly documented
The following facts about the FC-2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FC-2000 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the FC-2000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FC-2000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FC-2000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FC-2000 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]temescal.ferrotec.com — temescal.ferrotec.comtemescal.ferrotec.com
- [3]tudelft.nl — tudelft.nltudelft.nl
- [4]Product Quickfinder — web.archive.orgweb.archive.org
Last updated Oct 17, 2026.
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