Temescal

FC-2000

Deposition 100mm Temescal FC-2000 family

Research Quality: 40% complete

FC-2000 — web.archive.org — Fig. 01FC-2000web.archive.org^[1]

Plate 01Temescal FC2000 Inv# 64,981 Egun Deposition
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Plate 02Temescal FC2000 Inv# 64,981 Thermal Source Deposition
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What is it?

The FC-2000 is described as a fast-cycle, load-locked bell jar deposition system that allows the source to remain under vacuum during substrate reloading. The source tray supports multiple electron beam and resistance sources, and the source-to-substrate distance is listed at 19.5 inches, with an optional extension collar to 27.5 inches. The sources also list substrate domes and HSP planetary fixtures for 2-inch, 3-inch, 100-mm, and 150-mm wafers.

What can it run?

Process applications and technology nodes documented for this tool.

Small-scale production
Research and development

What do the numbers mean?

Power & electrical1

Electron beam power supply: Temescal model CV-6SLX electron beam power supply^[1]

Vacuum & pumping1

Vacuum handling: Allows the source to remain under vacuum during substrate reloading^[1]

Wafer handling2

Standard source-to-substrate distance: 19.5 in^[1]
Optional source-to-substrate distance with extension collar: 27.5 in^[1]

Optics & imaging1

Source tray: Supports multiple electron beam and resistance sources^[1]

Control & software3

Control system: Temescal Control System (TCS)^[1]
Deposition controller: Inficon XTC/3 deposition controller^[1]
Beam sweep controller: Temescal SuperSweep64 programmable beam sweep controller^[1]

Configuration & options5

System name: Temescal FC-2000 deposition system^[1]
System type: Bell jar deposition system^[1]
Operation: Fast-cycle, load-locked system^[1]
Bell jar diameter: 20 in (508 mm)^[1]
FC-2000 source tray diameter: 18 in (457 mm)^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
BJD-2000	—	—	Non-load-locked version of the FC/BJD-2000 line.	web.archive.org^[1]
FC-2000	—	—	Fast-cycle, load-locked version that allows the source to remain under vacuum during substrate reloading.	web.archive.org^[1]
FC-2800	—	—	The sources state that a field upgrade kit allows conversion into an FC-2800.	web.archive.org^[1]
BCD-2800	—	—	The sources state that a field upgrade kit allows conversion into a BCD-2800.	web.archive.org^[1]

Interested in this tool?

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What replaced it?

siblingTemescal FC-2800— Listed in the product quickfinder alongside FC-2800.source^[2]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Vacuum handlingAllows the source to remain under vacuum during substrate reloading^[1]
Electron beam power supplyTemescal model CV-6SLX electron beam power supply^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the FC-2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FC-2000 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the FC-2000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FC-2000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FC-2000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FC-2000 are on record.
Answerable by: an OEM parts catalog or a service engineer