Waferpedia

Tool family

Temescal FC-2800

The Temescal FC-2800 is a load-locked, clean room-compatible deposition system for production and large-wafer R&D applications.

Models in this family

  1. The Temescal FC-2800 is a load-locked, clean room-compatible deposition system for production and large-wafer R&D applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    FC-2800Load-locked version; contrasted with the non-load-locked BCD-2800.web.archive.org[1]
    BCD-2800Non-load-locked version; contrasted with the load-locked FC-2800.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org