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Temescal

FC-2800

DepositionTemescal FC-2800 family
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The Temescal FC-2800 is a deposition system for production and large-wafer R&D. The Temescal FC-2800 is clean room-compatible and load-locked. The Temescal FC-2800 has a 28-inch cubic product chamber and a standard 34-inch source-to-substrate distance.[1][2][3]

FC-2800 — web.archive.org
Fig. 01FC-2800web.archive.org[1]

What it is

General reference — not yet source-verified

The Temescal FC-2800 belongs to the class of vacuum thin-film deposition equipment. Machines of this class are used to place a selected material onto the surface of a wafer, mask, glass plate, ceramic part, or other substrate so that the deposited layer becomes part of the device structure, an interconnect stack, a contact system, or an optical coating.

How it works

General reference — not yet source-verified

During deposition, such systems typically manage source selection, shuttering, substrate presentation, and film-thickness control through in-situ monitoring methods appropriate to the class. Process outcomes are shaped by factors such as source purity, deposition rate, substrate temperature, line-of-sight geometry, and vacuum quality. In general, machines in this category are chosen when a process requires clean metallic or dielectric films, well-defined layer stacks, and controlled surface coverage.

Applications

General reference — not yet source-verified

Machines of this class are generally used for depositing conductive films, adhesion films, barrier films, reflective layers, electrode materials, and selected optical coatings. Typical end uses include semiconductor device fabrication, sensor structures, microelectronic interconnect formation, photonics work, research structures, and precision components that depend on engineered thin-film surfaces.

  • Production
  • Large-wafer R&D
  • Lift-off

What do the numbers mean?

Vacuum & pumping3

Cryopumps
Product and source chamber cryopumps[1]2 sources
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Product chamber cryopump
CT-400[1]2 sources
Accurate?
Source chamber cryopump
CT-8[1]2 sources
Accurate?

Wafer handling6

Use case
Mid-sized coater for production and large-wafer R&D[1]2 sources
Accurate?
Standard source-to-substrate distance
34 in[1]
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Optional source-to-substrate distance
42 in with optional source well extension collar[1]
Accurate?
Standard source-to-substrate distance
34 in (866 mm)[1]
Accurate?
Optional source-to-substrate distance
42 in (1076 mm) with optional source well extension collar[1]
Accurate?
Application
Production and large-wafer R&D[2]
Accurate?

Optics & imaging1

Source tray support
Multiple electron beam and resistance sources[2]
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Control & software2

Control system
Temescal Control System (TCS) with Auto, Manual, and Service Modes plus process datalogging[1]3 sources
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Deposition controller
Inficon XTC/3 deposition controller[1]
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Dimensions & facilities3

Product chamber dimensions
28 in high x 28 in x 28 in; 28 in (711 mm) cubic[1]
Accurate?
Product chamber dimensions
28 in high x 28 in x 28 in; 28 in cubic[1]
Accurate?
Product chamber dimensions
28 in high x 28 in x 28 in[1]
Accurate?

Configuration & options6

Type
Deposition system[1]2 sources
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Clean room compatibility
Clean room-compatible[1]
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Load-lock status
Load-locked FC-2800[1]
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Source trays
Support multiple e-beam and resistance sources[1]
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Load-lock status
Load-locked[1]
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Ion source
3 cm or 5 cm ion source available in product chamber[1]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
FC-2800——Load-locked version; contrasted with the non-load-locked BCD-2800.web.archive.org[1]
BCD-2800——Non-load-locked version; contrasted with the load-locked FC-2800.web.archive.org[1]
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What replaced it?

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • CryopumpsProduct and source chamber cryopumps[1]
  • Product chamber cryopumpCT-400[1]
  • Source chamber cryopumpCT-8[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Is the Temescal FC-2800 load-locked?

The Temescal FC-2800 is load-locked. The corresponding BCD-2800 is the non-load-locked version.[1][2]

What is the standard source-to-substrate distance on the FC-2800?

The Temescal FC-2800 has a standard source-to-substrate distance of 34 in. The optional source well extension collar increases the distance to 42 in.[1][2]

What control system does the FC-2800 use?

The Temescal FC-2800 uses the Temescal Control System. The Temescal Control System provides Auto, Manual, and Service modes plus process datalogging. The Temescal FC-2800 also uses an Inficon XTC/3 deposition controller.[1][2]

What deposition source configurations are supported on the FC-2800?

The Temescal FC-2800 source tray supports multiple electron beam and resistance sources. The Temescal FC-2800 can be configured with a Temescal removable-cover turret source in 4-pocket or 6-pocket form.[1][2]

What are the product chamber dimensions of the FC-2800?

The Temescal FC-2800 has a product chamber that measures 28 in. x 28 in. x 28 in.[1][2]

Not publicly documented

The following facts about the FC-2800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FC-2800 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the FC-2800 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the FC-2800 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the FC-2800 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the FC-2800 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]temescal.ferrotec.com — temescal.ferrotec.comtemescal.ferrotec.com
  3. [3]FC-2800 — Temescal | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  4. [4]Product Quickfinder — web.archive.orgweb.archive.org
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Last updated Oct 17, 2026.

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