Temescal
The Temescal FC-2800 is a deposition system for production and large-wafer R&D. The Temescal FC-2800 is clean room-compatible and load-locked. The Temescal FC-2800 has a 28-inch cubic product chamber and a standard 34-inch source-to-substrate distance.[1][2][3]

The Temescal FC-2800 belongs to the class of vacuum thin-film deposition equipment. Machines of this class are used to place a selected material onto the surface of a wafer, mask, glass plate, ceramic part, or other substrate so that the deposited layer becomes part of the device structure, an interconnect stack, a contact system, or an optical coating.
During deposition, such systems typically manage source selection, shuttering, substrate presentation, and film-thickness control through in-situ monitoring methods appropriate to the class. Process outcomes are shaped by factors such as source purity, deposition rate, substrate temperature, line-of-sight geometry, and vacuum quality. In general, machines in this category are chosen when a process requires clean metallic or dielectric films, well-defined layer stacks, and controlled surface coverage.
Machines of this class are generally used for depositing conductive films, adhesion films, barrier films, reflective layers, electrode materials, and selected optical coatings. Typical end uses include semiconductor device fabrication, sensor structures, microelectronic interconnect formation, photonics work, research structures, and precision components that depend on engineered thin-film surfaces.
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The Temescal FC-2800 is load-locked. The corresponding BCD-2800 is the non-load-locked version.[1][2]
The Temescal FC-2800 has a standard source-to-substrate distance of 34 in. The optional source well extension collar increases the distance to 42 in.[1][2]
The Temescal FC-2800 uses the Temescal Control System. The Temescal Control System provides Auto, Manual, and Service modes plus process datalogging. The Temescal FC-2800 also uses an Inficon XTC/3 deposition controller.[1][2]
The following facts about the FC-2800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FC-2800 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the FC-2800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FC-2800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FC-2800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FC-2800 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 17, 2026.
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