Temescal

FC-2800

Research Quality: 40% complete

What is it?

The Temescal FC-2800 is described as a mid-sized coater for production and large-wafer R&D. It is a clean room-compatible, load-locked system with a 28-inch cubic product chamber, a standard 34-inch source-to-substrate distance, and an optional 42-inch distance with a source well extension collar.

What can it run?

Process applications and technology nodes documented for this tool.

Production
Large-wafer R&D
Lift-off

What do the numbers mean?

Vacuum & pumping1

Cryopumps: Product and source chamber cryopumps^[1]

Wafer handling3

Use case: Mid-sized coater for production and large-wafer R&D^[1]
Standard source-to-substrate distance: 34 in^[1]
Optional source-to-substrate distance: 42 in with optional source well extension collar^[1]

Control & software2

Control system: Temescal Control System (TCS) with Auto, Manual, and Service Modes plus process datalogging^[1]
Deposition controller: Inficon XTC/3 deposition controller^[1]

Dimensions & facilities1

Product chamber dimensions: 28 in high x 28 in x 28 in; 28 in (711 mm) cubic^[1]

Configuration & options4

Type: Deposition system^[1]
Clean room compatibility: Clean room-compatible^[1]
Load-lock status: Load-locked FC-2800^[1]
Source trays: Support multiple e-beam and resistance sources^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
FC-2800	—	—	Load-locked version; contrasted with the non-load-locked BCD-2800.	web.archive.org^[1]
BCD-2800	—	—	Non-load-locked version; contrasted with the load-locked FC-2800.	web.archive.org^[1]

Interested in this tool?

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What replaced it?

siblingTemescal FC-2000— Listed in the product quickfinder alongside FC-2800.source^[2]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

CryopumpsProduct and source chamber cryopumps^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the FC-2800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FC-2800 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the FC-2800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FC-2800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FC-2800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FC-2800 are on record.
Answerable by: an OEM parts catalog or a service engineer