Waferpedia

Tool family

Temescal IC/5

TemescalDeposition1 entry

The Temescal IC/5 is a multi-process thin film deposition controller for evaporation and other physical vapor deposition processes.

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Models in this family

  1. IC/5

    The Temescal IC/5 is a multi-process thin film deposition controller for evaporation and other physical vapor deposition processes.