Temescal
IC/5
The Temescal IC/5 is a multi-process deposition controller for e-beam systems. The Temescal IC/5 is a thin film deposition controller for evaporation and other physical vapor deposition processes. The Temescal IC/5 can store up to 50 processes and 250 total layers.[1][2][3]
How it works
The Temescal IC/5 can store up to 50 processes and 250 total layers. The Temescal IC/5 offers unlimited storage with the floppy disk option. The Temescal IC/5 logs layer and process data in ASCII format for post-run analysis and recipe retrieval and loading. The Temescal IC/5 provides programmable control over sequential or co-deposition processes.[2][3]
What can it run?
Process applications and technology nodes documented for this tool.
- Evaporation
- Physical vapor deposition (PVD)
- E-beam systems
What do the numbers mean?
Control & software4
- Description
- Provides programmable control over sequential or co-deposition processes plus memory for up to 50 processes[3]
Configuration & options6
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Which process types does the Temescal IC/5 support?
The Temescal IC/5 is intended for evaporation and other physical vapor deposition processes. The Temescal IC/5 also provides programmable control over sequential or co-deposition processes.[2][3]
How many processes and layers can the Temescal IC/5 store?
The Temescal IC/5 can store up to 50 processes and 250 total layers. The Temescal IC/5 offers unlimited storage with the floppy disk option.[2]
Does the Temescal IC/5 provide data logging?
The Temescal IC/5 stores layer and process data in ASCII format for post-run analysis. The Temescal IC/5 also stores process recipes for retrieval and loading.[2]
Not publicly documented
The following facts about the IC/5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IC/5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IC/5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IC/5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IC/5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IC/5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
- [4]IC/5 — Temescal | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 16, 2026.
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