Waferpedia

Temescal

IC/5

DepositionTemescal IC/5 family
Research Quality: 40% complete
IC/5 — web.archive.org
Fig. 01IC/5web.archive.org[1]

What is it?

The sources describe the Temescal IC/5 as a multi-process deposition controller for e-beam systems and as a thin film deposition controller for evaporation and other physical vapor deposition (PVD) processes. The controller is described as having enhanced software and logic I/O features, and it can store up to 50 processes and 250 total layers, with unlimited storage available using the floppy disk option.

What can it run?

Process applications and technology nodes documented for this tool.

  • Evaporation
  • Physical vapor deposition (PVD)
  • E-beam systems

What do the numbers mean?

Control & software3

product type
Multi-process deposition controller[2]
Accurate?
application
Deposition controller for e-beam systems[1]
Accurate?
software and I/O
Enhanced software and logic I/O features[1]
Accurate?

Configuration & options5

process type
Evaporation and other physical vapor deposition (PVD) processes[1]
Accurate?
process storage
Up to 50 processes[2]
Accurate?
layer storage
250 total layers[2]
Accurate?
extended storage
Unlimited with the floppy disk option[2]
Accurate?
data logging
Stores layer and process data in ASCII format for post-run analysis[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the IC/5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IC/5 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IC/5 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IC/5 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IC/5 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IC/5 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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