Waferpedia

Tool family

Thermo Fisher Scientific FEI Helios NanoLab 660 FIB-SEM

Models in this family

  1. Thermo Fisher Scientific / FEI Helios NanoLab 660 is a dual-beam FIB-SEM with an Elstar UC SEM column, Tomahawk ion column, and a 6-inch piezo stage.