Waferpedia

Tool family

Thermotron ATS 195

ThermotronThermal / Diffusion2 entries
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Models in this family

  1. ATS 195 V 5-5 LN 2
  2. ATS 195 V LN 2

All entries

  1. ATS 195 V 5-5 LN 2Thermotron
    6 specs
  2. ATS 195 V LN 2Thermotron
    CategoryThermal / Diffusion
    1 spec