Thermotron
ATS 195 V 5-5 LN 2
The Thermotron ATS 195 V 5-5 LN 2 is an LN2-cooled system. The Thermotron ATS 195 V 5-5 LN 2 has a cold/hot compartment range of -73 to 177 Celsius. The Thermotron ATS 195 V 5-5 LN 2 has a hot compartment range from ambient to 200 Celsius.[1][2]
How it works
The unit is LN2 cooled and has two stated temperature ranges: a cold/hot compartment range of -73 to 177 Celsius and a hot compartment range from ambient to 200 Celsius.[1]
What do the numbers mean?
Power & electrical1
Configuration & options10
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ModelATS 195 V 5-5 LN 2[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the ATS 195 V 5-5 LN 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATS 195 V 5-5 LN 2 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ATS 195 V 5-5 LN 2 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ATS 195 V 5-5 LN 2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATS 195 V 5-5 LN 2 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATS 195 V 5-5 LN 2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]ATS 195 V 5-5 LN 2 — Thermotron | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.