Waferpedia

Tool family

Tokyo Electron A 8

Tokyo ElectronThermal / Diffusion3 entries
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Models in this family

  1. A 8 Batch Thermal Processing
  2. A 8 S D LPCVD Vertical
  3. A 8 S ZA

All entries

  1. A 8 Batch Thermal ProcessingTokyo Electron
    1 spec
  2. A 8 S D LPCVD VerticalTokyo Electron
    CategoryThermal / Diffusion
    3 specs
  3. A 8 S ZATokyo Electron
    CategoryThermal / Diffusion
    6 specs