Tokyo Electron

The Tokyo Electron Unity II E 855 SS is an etcher for 8-inch wafers.

The TEL Trias 200 SPA is a cluster tool for processing 300 mm wafers, available in dry etch and CVD configurations.

The Tokyo Electron Vigus RK 3 is a semiconductor equipment model that handles 12-inch wafers.

The Tel Unity II E 85 DD is an 8-inch oxide etch system.

The Tokyo Electron Trias Metal is a semiconductor processing system that supports metal chemical vapor deposition (CVD) for Ti/TiN and metal etching, and handles 300 mm (12-inch) wafers.

The TEL Trias is a plasma nitridation deposition system handling 8-inch and 12-inch wafers.

The Tokyo Electron Tactras is a series of plasma etch systems for 300mm wafers, first launched in 2006.

The Tokyo Electron Alpha 8 S ZC is a furnace for 8-inch wafers used for nitride processing.

The Tokyo Electron Alpha 6 S is a batch processing deposition system introduced in 2000, with a variant configured for low-pressure silicon nitride CVD on 8-inch wafers.

The Tokyo Electron Clean Track Lithius Pro V is a resist coater/developer for 12-inch wafers, described as a multi-block system.

The Tokyo Electron Alpha 8 S is a vertical furnace for 8-inch wafers, configured for ATM Oxide processes.

Tokyo Electron Act 12 DUV Photoresist Coater / Developer Track is a deep ultraviolet wafer-processing system with a right-to-left wafer flow and 300mm wafer setup.

The Telindy Plus I M 1 is an ALD furnace with a 125 wafer load size, dual boat system option, and 400 VAC 50/60 Hz 3-phase power.

The Telius SP Vesta is a dry etcher for 12-inch wafers manufactured by Tokyo Electron (TEL).

The TEL Tokyo Electron Telius is a dry etcher for 300 mm wafers.

Tokyo Electron Clean Track ACT-8 is an industry-standard wafer coater and developer used in a DUV lithography cluster with an in-line exposure unit interface.

Tokyo Electron Clean Track Act 8 is an 8-inch coater/developer track with an interface unit for a Canon FPA-3000 i5 stepper and wafer edge exposure.

The Precio series is a fully automatic wafer-probing platform from Tokyo Electron Limited.

The Tokyo Electron Unity ME 8555 DDD is a dielectric etch system for 8-inch wafers.

General referenceTokyo Electron Mark 8 is a lithography machine used to transfer patterned circuit images onto a photoresist-coated substrate. It belongs to the class of tools that define feature locations for subsequent semiconductor fabrication steps.

The Tokyo Electron Precio Automatic Wafer Prober is a 12-inch automatic wafer prober.

Tokyo Electron NS 300 + Wafer Scrubber is a wet-process wafer scrubber for 8-inch wafers.

The Tokyo Electron NS 300 Z Wafer Scrubber is a 12-inch wafer scrubber with software version 6.00.26.2 and a 208 AC, 3-phase power rating.

Tokyo Electron Clean Track Lithius Pro Z i Resist is a coater/developer system described as a 12-inch multi block tool.