Waferpedia

Tool family

Tokyo Electron Act

Tokyo Electron6 entries
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Models in this family

  1. Act 8 I-Line Trackintroduced 1999i-line

    Tokyo Electron Act 8 I-Line Track is a lithography track system used with photoresist processing in semiconductor manufacturing. It is a class of wafer handling and coating-development equipment that supports pattern transfer by preparing wafers for exposure and post-exposure processing.

    Cited variants

    DesignationGenerationVintageChangesSource
    Act 8 I-Line Track, 8" 1C/3DI-Line1999Listed with 1C/3D configuration and 1999 vintage.Equipment inventory listing[1]
    Act 8 I-Line Track, 8" 2C/2DI-Line2001Listed with 2C/2D configuration and 2001 vintage.Equipment inventory listing[2]
    Tel Act 8 I-Line Track, 8" 1C/3D 1999 Vintagei-line1999—Equipment inventory listing[1]
    Tel Act 8 I-Line Track, 8" 1C/3D 2000 Vintagei-line2000—Equipment inventory listing[3]
    Tel Act 8 I-Line Track, 8" 2C/2D 2000 Vintagei-line2000—Equipment inventory listing[4]
    Tel Act 8 I-Line Track, 8" 2C/2D 2001 Vintagei-line2001—Equipment inventory listing[2]
  2. Act 8

    Cited variants

    DesignationGenerationVintageChangesSource
    Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates—2006Listed with dual-block configuration and the specified port, coater, developer, TCT, and hot-plate counts; described as 2006 vintage.Equipment inventory listing[5]
    Act 8 Coater / Developer, 8" - Single—2014Listed as single configuration; described as 2014 vintage.Equipment inventory listing[6]
    Act 8 Coater / Developer, 8"—2000–2001Listed as 2000, 2001 vintage.Equipment inventory listing[7]
    Tel Act 8 Coater / Developer, 8" - Single—2014Described as a single vintage 2014 configuration.Equipment inventory listing[6]
    Tel Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates—2006Described with a dual-block configuration and the listed ports, coater/developer count, TCT, and hot plates; vintage 2006.Equipment inventory listing[5]
    Tel Act 8 Coater / Developer, 8"—2000–2001Described as vintage 2000, 2001.Equipment inventory listing[7]
  3. Act 8 AC
  4. Act 8 Coater Developer Track
  5. Act 8 DUV Track
  6. Act 8 Metal

    Tokyo Electron Act 8 Metal Etcher is a metal etcher with 2 chamber DPS Metal, 2 chamber ASP+, 2 orienter/degas, and Lynx OS.

All entries

  1. Act 8 I-Line TrackTokyo Electron

    General referenceTokyo Electron Act 8 I-Line Track is a lithography track system used with photoresist processing in semiconductor manufacturing. It is a class of wafer handling and coating-development equipment that supports pattern transfer by preparing wafers for exposure and post-exposure processing.

    CategoryLithography
    2 specs
  2. Act 8Tokyo Electron
    8 specs
  3. Act 8 ACTokyo Electron
    1 spec
  4. Act 8 Coater Developer TrackTokyo Electron
    1 spec
  5. Act 8 DUV TrackTokyo Electron
    CategoryLithography
    1 spec
  6. Act 8 MetalTokyo Electron

    Tokyo Electron Act 8 Metal Etcher is a metal etcher with 2 chamber DPS Metal, 2 chamber ASP+, 2 orienter/degas, and Lynx OS.

    CategoryEtch
    6 specs

Sources

Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
  7. [7]Equipment inventory listing