Tokyo Electron Alpha 303

Models in this family

1. Alpha 303 i

   Tokyo Electron Alpha 303 i is a thermal and diffusion furnace system used in semiconductor processing. Machines of this class support heat-based process steps that alter material properties on wafers through controlled exposure to elevated temperature.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Nitride	—	2005	—	Equipment inventory listing[1]

2. Alpha 303 i H
3. Alpha 303 i K

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Alpha 303 i K Furnace, 12" MTO	—	2002	—	Equipment inventory listing[2]
   Alpha 303 i K Furnace, 12" DCS-MTO	—	2009	—	Equipment inventory listing[3]

4. Alpha 303 i Vertical

   The Tokyo Electron Alpha 303 i Vertical is a thermal processing and diffusion furnace system used in semiconductor manufacturing. Machines of this class provide controlled heating in a vertical process chamber for diffusion, oxidation, annealing, and related high-temperature wafer treatments.

Sources