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Tokyo Electron CleanTrack ACT 8

Tokyo ElectronLithography1 entry

Tokyo Electron Clean Track ACT-8 is an industry-standard wafer coater and developer used in a DUV lithography cluster with an in-line exposure unit interface.

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Models in this family

  1. CleanTrack ACT 8

    Tokyo Electron Clean Track ACT-8 is an industry-standard wafer coater and developer used in a DUV lithography cluster with an in-line exposure unit interface.