Waferpedia

Tool family

Tokyo Electron Telindy

Tokyo ElectronThermal / Diffusion3 entries
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Models in this family

  1. Telindy Plus I M 1

    The Telindy Plus I M 1 is an ALD furnace with a 125 wafer load size, dual boat system option, and 400 VAC 50/60 Hz 3-phase power.

  2. Telindy Plus I Rad Vertical
  3. Telindy Vertical

All entries

  1. Telindy Plus I M 1Tokyo Electron

    The Telindy Plus I M 1 is an ALD furnace with a 125 wafer load size, dual boat system option, and 400 VAC 50/60 Hz 3-phase power.

    CategoryDepositionWafer125 Wafer Load Size
    5 specs
  2. Telindy Plus I Rad VerticalTokyo Electron
    CategoryThermal / Diffusion
    1 spec
  3. Telindy VerticalTokyo Electron
    CategoryThermal / Diffusion
    2 specs