Waferpedia

Tool family

Tokyo Electron Telindy

Tokyo ElectronThermal / Diffusion3 entries
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Models in this family

  1. Telindy Plus I M 1

    The Telindy Plus I M 1 is an ALD furnace with a 125 wafer load size, dual boat system option, and 400 VAC 50/60 Hz 3-phase power.

  2. Telindy Plus I Rad Vertical

    The Telindy Plus I Rad Vertical Furnace is a vertical furnace with a 12-inch wafer size.

  3. Telindy Vertical

    The Tel Telindy Vertical Furnace is a vertical furnace for thermal processing on 12-inch wafers, supporting ALD and Nitride processes.

    Cited variants

    DesignationGenerationVintageChangesSource
    Tel Telindy Vertical Furnace, 12" ALD——Described as 12" ALD.Equipment inventory listing[1]
    Tel Telindy Vertical Furnace, 12" Nitride——Described as 12" Nitride.Equipment inventory listing[2]

All entries

  1. Telindy Plus I M 1Tokyo Electron

    The Telindy Plus I M 1 is an ALD furnace with a 125 wafer load size, dual boat system option, and 400 VAC 50/60 Hz 3-phase power.

    CategoryDepositionWafer125 Wafer Load Size
    10 specs
  2. Telindy Plus I Rad VerticalTokyo Electron

    The Telindy Plus I Rad Vertical Furnace is a vertical furnace with a 12-inch wafer size.

    CategoryThermal / Diffusion
    6 specs
  3. Telindy VerticalTokyo Electron

    The Tel Telindy Vertical Furnace is a vertical furnace for thermal processing on 12-inch wafers, supporting ALD and Nitride processes.

    CategoryThermal / Diffusion
    7 specs

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing