Waferpedia

Tool family

Tokyo Electron Unity

Tokyo ElectronDeposition4 entries
LinkedIn X Email

Models in this family

  1. Unity
  2. Unity 85 DS

    Cited variants

    DesignationGenerationVintageChangesSource
    U 2 S 855 II———Equipment inventory listing[1]
  3. Unity EP
  4. Unity ME 8555 SSS Dry

All entries

  1. UnityTokyo Electron
    CategoryDeposition
    1 spec
  2. Unity 85 DSTokyo Electron
    5 specs
  3. Unity EPTokyo Electron
    CategoryDeposition
    1 spec
  4. Unity ME 8555 SSS DryTokyo Electron
    CategoryEtch
    3 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing