Tokyo Electron Unity

Models in this family

1. Unity
2. Unity 85 DS

   Tokyo Electron Unity 85 DS is a 2-chamber oxide etch tool with endpoint capability, 3ea pumps, and C4F8, O2, Ar gas delivery.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   U 2 S 855 II	—	—	—	Equipment inventory listing[1]

3. Unity EP

   The Tokyo Electron Unity EP is a 200mm chemical vapor deposition (CVD) tool configured with TiN chambers.

4. 

   Unity ME 8555 SSS Dry

   The Tokyo Electron Unity ME 8555 SSS Dry is a dry etch tool. The Unity ME 8555 SSS Dry is configured for 8 inch wafers.

Sources