Tokyo Electron Unity II E 85

Models in this family

1. Unity II E 85 DD

   The Tel Unity II E 85 DD is an 8-inch oxide etch system.

2. Unity II E 85 DPA
3. Unity II E 85 DPA Dry
4. Unity II E 85 TPATC
5. Unity II E 85 TPATC Dry

   Tokyo Electron Unity II E 85 TPATC is a dry etcher for 8-inch wafers.