Waferpedia

Tool family

Ulvac NE 5000 N

UlvacEtch1 entry

Ulvac NE 5000 N Etcher.

Models in this family

  1. The Ulvac NE 5000 N is an etcher described with 6-inch wafer size, helium cooling, auto loading and unloading, and uniformity of +/- 3%.