Waferpedia

Tool family

Ulvac UNECS-2000

UlvacMeasurement1 entry

The ULVAC UNECS-2000 is a spectroscopic ellipsometer used to measure refractive index and thin-film thickness.

Models in this family

  1. The ULVAC UNECS-2000 is a spectroscopic ellipsometer used to measure refractive index and thin-film thickness.