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Tool family

Varian E 500 EHP Medium Current

VarianIon Implantation1 entry

Varian E 500 EHP Medium Current Implanter.

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Models in this family

  1. E 500 EHP Medium Current

    The Varian E 500 EHP Medium Current is a medium current implanter for ion implantation. The Varian E 500 EHP Medium Current includes a thin wafer handling kit and can be converted to 8-inch wafers.