Varian HS 16 Diffusion

Models in this family

1. 

   HS 16 Diffusion

   The Varian HS 16 Diffusion is a high-throughput diffusion pump used for vacuum applications. The Varian HS 16 Diffusion is water-cooled and uses a heater-driven diffusion pump design.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   HS-16, 8.1 kW	—	—	Listed as an HS-16 power variant with 8.1 kW electrical power, 10,000 l/s air pumping speed, 12,500 l/s helium pumping speed, and 3 qt fluid charge.	idealvac.com[1]
   HS-16, 9.6 kW	—	—	Listed as an HS-16 power variant with 9.6 kW electrical power, 12,500 l/s air pumping speed, 17,500 l/s helium pumping speed, and 5 qt fluid charge.	idealvac.com[1]

Sources