Waferpedia

Tool family

Varian VHS

Varian2 entries

Models in this family

  1. The Varian VHS 250 is a diffusion pump used for high vacuum applications.

  2. The Varian VHS 4 is a vacuum pump with a pumping speed of 1200 l/s.

All entries

  1. VHS 250 DiffusionVarian

    The Varian VHS 250 is a diffusion pump used for high vacuum applications.

    CategoryThermal / Diffusion
    3 specs
  2. VHS 4Varian

    The Varian VHS 4 is a vacuum pump with a pumping speed of 1200 l/s.

    4 specs