Waferpedia

Tool family

Veeco Spector

Veeco2 entries

Models in this family

  1. Veeco Spector Bare is a bare chamber described as including a frame and having no parts inside the chamber.

  2. The Veeco Spector is an ion beam deposition (IBD) system.

All entries

  1. Spector BareVeeco

    Veeco Spector Bare is a bare chamber described as including a frame and having no parts inside the chamber.

    2 specs
  2. Spector Ion BeamVeeco

    The Veeco Spector is an ion beam deposition (IBD) system.

    CategoryDeposition
    1 spec