Tool family
Veeco TurboDisc K 465 GaN MOCVD is a metal organic chemical vapor deposition system.
Veeco TurboDisc K 465 is a MOCVD system described as "K465 GaN Turbo disk" with 3-phase, 5-wire power input rated at 400 Vac, 280 A, 50/60 Hz.
Veeco TurboDisc K 465 GaN MOCVD is a metal organic chemical vapor deposition system.
Veeco TurboDisc K 465 is a MOCVD system described as "K465 GaN Turbo disk" with 3-phase, 5-wire power input rated at 400 Vac, 280 A, 50/60 Hz.