Waferpedia

Tool family

Woollam M-2000DI

The Woollam M-2000 Model DI is a variable-angle spectroscopic ellipsometer for non-destructive optical characterization of thin films.

Models in this family

  1. The Woollam M-2000 Model DI is a variable-angle spectroscopic ellipsometer for non-destructive optical characterization of thin films.