Waferpedia

Woollam

M-2000DI

EllipsometerWoollam M-2000DI family
Research Quality: 30% complete
LinkedIn X Email
WoollamM-2000DI
No photo available yet

What is it?

The source describes the Woollam M-2000DI as a versatile variable-angle spectroscopic ellipsometer (VASE) used for ex-situ optical characterization of patterned and unpatterned thin films. It reports a wavelength range of 193 nm to 1690 nm and notes that data can be modeled in CompleteEase software to obtain thin film thickness, refractive index, and absorption properties.

What can it run?

Process applications and technology nodes documented for this tool.

  • Ex-situ optical characterization of patterned thin films
  • Ex-situ optical characterization of unpatterned thin films

What do the numbers mean?

Optics & imaging2

Purpose
Non-destructive optical characterization of thin films[1]
Accurate?
Wavelength range
193 nm to 1690 nm[1]
Accurate?

Configuration & options5

OEM
J.A. Woollam Co.[1]
Accurate?
Model
Woollam M-2000 Model DI[1]
Accurate?
Instrument type
Variable-angle spectroscopic ellipsometer (VASE)[1]
Accurate?
Goniometer range
45°-90°[1]
Accurate?
X-Y translation stage
Motorized 150 mm X-Y translation stage[1]
Accurate?
Interested in this tool?
Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the M-2000DI are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M-2000DI are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M-2000DI are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the M-2000DI are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the M-2000DI are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M-2000DI is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
Was this page accurate?

Last updated Jul 29, 2026.