Waferpedia

Tool family

YES 1000FP

YESWet Processing / Clean1 entry

The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.

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Models in this family

  1. 1000FP

    The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.