Waferpedia

Tool family

YES 12-2P-CP

YESThermal / Diffusion1 entry

The YES-PB Series manual-load high-temperature cure oven is shown with a 12-2P-CP configuration for 300 mm wafers and is described for MEMS and semiconductor process applications.

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Models in this family

  1. 12-2P-CP

    Cited variants

    DesignationGenerationVintageChangesSource
    YES 6-2P-CP——Listed as a related spec option for 150 mm wafers.web.archive.org[1]
    YES 8-2P-CP——Listed as a related spec option for 200 mm wafers.web.archive.org[1]
    YES 12-2P-CP——Listed as a related spec option for 300 mm wafers.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org