Tool family
Model 1518 is a dual-function ultra-clean system for HMDS prime and image reversal with stated capacities for 4-inch through 8-inch wafer cassettes.
Model 1518 is a dual-function ultra-clean system for HMDS prime and image reversal with stated capacities for 4-inch through 8-inch wafer cassettes.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-1518SM | — | — | Silylation variant; source states it has above-listed capacities for Vapor Prime and Image Reversal, or Silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers. | web.archive.org[1] |