YES 1518SM

Models in this family

1. 1518SM

   The YES-1518SM is a dual-function vacuum bake / vapor prime product model that supports vapor prime, image reversal, and silylation operations.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   YES-58TASM	—	—	Provides vapor prime and image reversal capacities, or silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers.	web.archive.org[1]
   YES-1518SM	—	—	Provides above-listed vapor prime and image reversal capacities, or silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers.	web.archive.org[1]

Sources