YES
Process applications and technology nodes documented for this tool.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-58TASM | — | — | Provides vapor prime and image reversal capacities, or silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers. | web.archive.org[1] |
| YES-1518SM | — | — | Provides above-listed vapor prime and image reversal capacities, or silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers. | web.archive.org[1] |
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The following facts about the 1518SM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1518SM are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 1518SM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1518SM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1518SM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1518SM are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Last updated Jul 29, 2026.