Waferpedia

Tool family

YES 310TA

YESThermal / Diffusion1 entry

The YES 310TA is a vacuum cure and HMDS vapor prime oven used for batch priming of wafers to improve photoresist adhesion.

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Models in this family

  1. 310TA

    The YES 310TA is a vacuum cure and HMDS vapor prime oven used for batch priming of wafers to improve photoresist adhesion.

    Cited variants

    DesignationGenerationVintageChangesSource
    YES-310TA———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org