Waferpedia

Tool family

YES 500

The YES 500 is an in-line plasma cleaner, described as the IL 500 AUTO In-Line Plasma System, a robotically loaded fully automatic plasma system.

Models in this family

  1. The YES 500 is an in-line plasma cleaner, described as the IL 500 AUTO In-Line Plasma System, a robotically loaded fully automatic plasma system.

    Cited variants

    DesignationGenerationVintageChangesSource
    IL 500 MANManually loaded version that can be upgraded later to full robotics, if needed.web.archive.org[1]
    IL 500 AUTORobotically loaded, fully automatic version.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org