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YES

500

Wet Processing / CleanYES 500 family
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YES500
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What it is

The YES 500 is an in-line plasma cleaner. The IL 500 AUTO In-Line Plasma System combines the accumulated plasma knowledge of Yield Engineering Systems (YES) and Glen Technologies Inc. with the specialized experience of a leading automation company serving the bonding market.[1]

The VES IL 500 AUTO is a robotically loaded, fully automatic plasma system. The IL 500 MAN is a manually loaded version that can be upgraded later to full robotics.[1]

How it works

The system is designed to integrate into commercially available automated bonding systems and is designed with SMEMA protocol. It can be configured to handle lead frames, boats, or substrate/PCB products.[1]

The system houses a special captive magazine called CLEANMAG, which is snap-loaded into a quick-change, self-aligning base assembly. The full transport magazine charge is robotically push-loaded into the CLEANMAG before the cleaning cycle and then push-loaded from the CLEANMAG back into the transport magazine after the process.[1]

All moving parts and robotics are mounted external to the chamber to eliminate particles generated by friction.[1]

Where it fits in the process flow

The YES 500 sits in an automated bonding process flow as an in-line plasma cleaning system. It is intended to provide automatic processing of sensitive components before or within the bonding system environment.[1]

Applications

The system is configured to handle lead frames, boats, and substrate/PCB products.[1]

It is designed to provide safe, clean automatic processing of sensitive components and to comply with stringent cleanliness requirements.[1]

  • Automatic plasma cleaning
  • Integration into automated bonding systems
  • Processing of lead frames
  • Processing of boats
  • Processing of substrate/PCB products

What do the numbers mean?

Wafer handling3

Loading
Robotically loaded[1]
Accurate?
Supported products
Lead frames, boats, or substrate/PCB products[1]
Accurate?
Contamination control
All moving parts and robotics are mounted external to the chamber[1]
Accurate?

Configuration & options5

System name
IL 500 AUTO In-Line Plasma System[1]
Accurate?
Automation
Fully automatic[1]
Accurate?
Integration
Designed to integrate into any commercially available automated bonding system[1]
Accurate?
Protocol
SMEMA protocol[1]
Accurate?
Clean handling feature
Special captive magazine (CLEANMAG) that is snap-loaded into a quick-change, self-aligning base assembly[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
IL 500 MANManually loaded version that can be upgraded later to full robotics, if needed.web.archive.org[1]
IL 500 AUTORobotically loaded, fully automatic version.web.archive.org[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the YES 500?

It is an in-line plasma cleaner.[1]

Is the YES 500 automatic or manual?

The VES IL 500 AUTO is robotically loaded and fully automatic. The IL 500 MAN is manually loaded and can be upgraded later to full robotics.[1]

What product types can it handle?

It can be configured to handle lead frames, boats, and substrate/PCB products.[1]

How is contamination from motion addressed?

All moving parts and robotics are mounted external to the chamber to eliminate particles generated by friction.[1]

Not publicly documented

The following facts about the 500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 500 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 500 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 500 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 500 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 500 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 27, 2026.

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