Waferpedia

Tool family

YES 58

YESThermal / Diffusion3 entries
LinkedIn X Email

Models in this family

  1. 58
  2. 58 SM HMDS Vacuum
  3. 58 TA HMDS Vacuum Bake Vapor Prime

    The Yes 58 TA HMDS Vacuum Bake / Vapor Prime Oven supports vacuum bake vapor prime with HMDS, vacuum bake without HMDS, and image reversal process with gaseous ammonia.

All entries

  1. 58YES
    CategoryThermal / Diffusion
    4 specs
  2. 58 SM HMDS VacuumYES
    CategoryThermal / Diffusion
    1 spec
  3. 58 TA HMDS Vacuum Bake Vapor PrimeYES

    The Yes 58 TA HMDS Vacuum Bake / Vapor Prime Oven supports vacuum bake vapor prime with HMDS, vacuum bake without HMDS, and image reversal process with gaseous ammonia.

    CategoryThermal / Diffusion
    20 specs