Waferpedia

Tool family

YES 5TA

YESThermal / Diffusion1 entry

The YES-5TA is a Vacuum Bake / Vapor Prime system in the YES vacuum bake product line.

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Models in this family

  1. 5TAintroduced 1980produced 1980–

    The YES-5TA is a Vacuum Bake / Vapor Prime system in the YES vacuum bake product line.