YES

5TA

Thermal / Diffusion 4-inch wafers; 5-6-inch wafers; 8-inch wafers; 12-inch wafersIntroduced 1980Produced 1980–YES 5TA family

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YES5TA

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Wafer size

4-inch wafers; 5-6-inch wafers; 8-inch wafers; 12-inch wafers

Produced

1980–

Performance

2 full loads/hr.^[1]

What is it?

The sources identify the YES-5TA as part of Yield Engineering Systems' Vacuum Bake / Vapor Prime systems. The model is listed in a product section alongside YES-3TA and YES-6112, and its specification chart states capacity, cleanliness, throughput, HMDS usage, temperature, dimensions, weight, and power requirements.

What can it run?

Process applications and technology nodes documented for this tool.

dehydration
vapor deposition of a priming agent
vapor prime

What do the numbers mean?

Power & electrical1

power: System Vacuum Pump: 115V, 60Hz, 1 Phase, 7A or 220V, 50Hz, 1 Phase, 3.5A^[2]

Wafer handling3

capacity: 8 cassettes of 5-6 in. wafers, or 2 cassettes of 8 in. wafers, or 1 cassette of 12 in. wafers^[1]
cleanliness: < 5x1 micron particles per 6-in. wafer^[1]
HMDS usage: < 5 ml/200 wafers (75 prime cycles/pint)^[1]

Performance1

throughput: 2 full loads/hr.^[1]

Dimensions & facilities3

chamber dimensions: 16-in (406mm) high x 16-in (406mm) wide x 18-in (406mm) deep^[2]
system dimensions: 31.75-in (806mm) high x 27.75-in (705mm) wide x 23-in (584mm) deep^[2]
weight: 245 pounds stand-alone; 400 pounds international shipping (includes crate)^[2]

Configuration & options1

temperature: 160°C max^[1]

Vintage & configurations

1980Production start^[1]
Vacuum Bake / Vapor Prime was the first product YES produced back in 1980.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

powerSystem Vacuum Pump: 115V, 60Hz, 1 Phase, 7A or 220V, 50Hz, 1 Phase, 3.5A^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 5TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the 5TA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5TA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5TA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5TA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 5TA are on record.
Answerable by: an OEM parts catalog or a service engineer