Waferpedia

Tool family

YES 6-2P-CP

The YES 6-2P-CP is a PB Series manual-load high temperature cure oven with specs listed for 150 mm wafers.

Models in this family

  1. The YES 6-2P-CP is a manual-load high temperature cure oven designed for 150 mm wafers, used in polyimide cure, BCB bake, and copper anneal applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    YES 6-2P-CPSpecs listed for 150 mm wafers.web.archive.org[1]
    YES 8-2P-CPSpecs listed for 200 mm wafers.web.archive.org[1]
    YES 12-2P-CPSpecs listed for 300 mm wafers.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org