Waferpedia

Tool family

YES 6112

YESThermal / Diffusion1 entry

YES-6112 is an ultra-clean Vacuum Bake/Vapor Prime system for 8-inch wafers.

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Models in this family

  1. 6112introduced 2000

    YES-6112 is an ultra-clean Vacuum Bake/Vapor Prime system for 8-inch wafers.