YES
6112
YES 6112 is a Thermal / Diffusion tool for 8 in. wafers. YES 6112 is a Vacuum Bake/Vapor Prime system. YES 6112 has a capacity of 4 cassettes of 8 in. wafers.[1][2]
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedVacuum bake and vapor prime processing sits before organic coating and other downstream lithography steps. The process prepares wafer surfaces by dehydration and priming so later coatings adhere properly.
The YES 6112 is used with cassette-based wafer loading in batch processing. The YES 6112 fits into pre-coating surface preparation rather than pattern exposure or etch processing.
Applications
The YES 6112 is used for vacuum bake and vapor prime processing. The YES 6112 is also used for pre-programmed dehydration and vapor deposition of a priming agent.[2][1]
- Vacuum bake
- Vapor prime
- Pre-programmed dehydration
- Vapor deposition of a priming agent
What do the numbers mean?
Wafer handling4
Performance1
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 6112 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6112 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6112 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6112 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6112 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6112 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]Yield Engineering Systems - Products — web.archive.orgweb.archive.org
Last updated Oct 12, 2026.
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