Waferpedia

Tool family

YES CV200 RFS

YESWet Processing / Clean1 entry

The YES CV200 RFS Plasma Strip / Descum System is a plasma stripping and descum tool for photoresist, polyimide, organics removal, and descum processes.

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Models in this family

  1. CV200 RFS

    The YES CV200 RFS Plasma Strip / Descum System is a plasma stripping and descum tool for photoresist, polyimide, organics removal, and descum processes.