Waferpedia

Tool family

YES G1000

The YES G1000 Plasma Cleaning System is a plasma cleaning system for cleaning and low-temperature descum of substrates, surface modification, and gentle cleaning of inorganic substrates.

Models in this family

  1. The YES G1000 Plasma Cleaning System is a plasma cleaning system for cleaning and low-temperature descum of substrates, surface modification, and gentle cleaning of inorganic substrates.