Waferpedia

Tool family

YES R3

YESWet Processing / Clean1 entry

YES-R3 is a plasma cleaning system with sequential microprocessor control, up to 90 stored gas programs, and a 500 W power supply.

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Models in this family

  1. R3

    YES-R3 is a plasma cleaning system with sequential microprocessor control, up to 90 stored gas programs, and a 500 W power supply.