YES

R3

Wet Processing / Clean YES R3 family

Research Quality: 40% complete

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R3 — cnsi.ucsb.edu — Fig. 01R3cnsi.ucsb.edu^[1]

Power

500 Watt^[3]

Gas delivery

Two standard; optional third input^[3]

What is it?

The YES-R3 plasma cleaner is listed among plasma cleaning products and described as a mainstay of plasma cleaning. The source states that it supports up to 90 separate one- or two-gas programs, includes a 500 W power supply, provides two plasma gas inputs as standard with an optional third, and has a standard backfill input and two 12-inch square electrode sets.

What can it run?

Process applications and technology nodes documented for this tool.

Plasma cleaning

What do the numbers mean?

Power & electrical1

Power supply: 500 Watt^[3]

Gas & chemistry2

Program storage: Up to 90 separate one- or two-gas programs in memory^[3]
Plasma gas inputs: Two standard; optional third input^[3]

Control & software1

Control: Sequential microprocessor^[3]

Configuration & options4

System type: Plasma cleaner / plasma cleaning system^[3]
Backfill input: Standard^[3]
Electrode sets: Two 12-inch square electrode sets standard^[3]
Sample tray capacity: Two 12 x 12 in. sample trays; total capacity 325 sq.in.^[3]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Program storageUp to 90 separate one- or two-gas programs in memory^[3]
Power supply500 Watt^[3]
Plasma gas inputsTwo standard; optional third input^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the R3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the R3 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the R3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the R3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the R3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the R3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report