Tool family
Zygo Z3D-7000
The ZYGO Z3D-7000 is a non-contact, optical metrology system for semiconductor wafers that accommodates 200 mm and 300 mm wafer sizes.
Models in this family
- Z3D-70005th generation
The ZYGO Z3D-7000 is a non-contact, optical metrology system for semiconductor wafers that accommodates 200 mm and 300 mm wafer sizes.
