Waferpedia

load port

Automation

The standardized station on the front of a production tool where a wafer carrier (FOUP or SMIF pod) is placed — by an operator or overhead transport system — docked, and opened so the tool's robot can access the wafers. Load-port dimensions and behavior are defined by SEMI standards so any carrier fits any tool.

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]FOUPWikipediaen.wikipedia.org