Veeco

WaferStorm 3303 Automated Solvent Processor

Load port-TDK with wafer mapping and RFID reader Veeco Waferstorm family

Research Quality: 20% complete

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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Wafer size

Load port-TDK with wafer mapping and RFID reader

Vacuum

vacuum paddles (4)^[1]

What is it?

Veeco WaferStorm 3303 is an automated solvent processor with a 300mm FOUP load port, wafer mapping and RFID reader, and robotic handling for 200/300mm wafers.

What do the numbers mean?

Power & electrical1

Solvent immersion station, SS construction with 2-kW heater and vertical agitation^[1]

Accurate?

Vacuum & pumping2

vacuum paddles (4)^[1]

Accurate?

Recirculation, While Knight pump with 9.0-µm and 0.1-µm filters^[1]

Accurate?

Wafer handling4

Wafer size: Load port-TDK with wafer mapping and RFID reader^[1]; 200-mm adapter plate (Allows 200mm Cassette in place of 300mm FOUP)^[1]
Wafer size: Robotic wafer handler:^[1]
Wafer size: wafer alignment with LED backlight, color camera, and PC image processing Handler cover drain^[1]

Gas & chemistry1

Station 1: Solvent Immersion 200/300mm (Fill by NMP Fresh Supply)^[1]

Optics & imaging1

IR detector, 120-degree viewing angle and Linear Heat Detector Wire^[1]

Accurate?

Control & software4

PC-based user interface with local data storage^[1]

Accurate?

SOL-based database RAID drive for control system and data storage^[1]

Accurate?

SECS/GEM software for host interface^[1]

Accurate?

UPS battery backup for PC^[1]

Accurate?

Configuration & options7

Single 300mm FOUP load port for high volume platform^[1]

Accurate?

Stainless steel with mirror finish^[1]

Accurate?

CO2 Fire suppression system for 90" frame^[1]

Accurate?

3-Color LED status light lower (red, yellow, green)^[1]

Accurate?

ULPA Filter with Air Ionizer bar (Standard ESD level l)^[1]

Accurate?

vertical, rotary, two paddle axes^[1]

Accurate?

additional paddle axis (2)^[1]

Accurate?

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configurationvacuum paddles (4)^[1]
Station 1Solvent Immersion 200/300mm (Fill by NMP Fresh Supply)^[1]
ConfigurationSolvent immersion station, SS construction with 2-kW heater and vertical agitation^[1]
ConfigurationRecirculation, While Knight pump with 9.0-µm and 0.1-µm filters^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the WaferStorm 3303 Automated Solvent Processor are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WaferStorm 3303 Automated Solvent Processor are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the WaferStorm 3303 Automated Solvent Processor are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WaferStorm 3303 Automated Solvent Processor are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WaferStorm 3303 Automated Solvent Processor are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WaferStorm 3303 Automated Solvent Processor is not on record.
Answerable by: an OEM datasheet or a fab qualification report