2 entries
- 3 HR Mask Aligner UV ExposureABM
The ABM 3 HR Mask Aligner / UV Exposure System is a mask aligner with a precision alignment stage, a 4" x 4" mask holder, and a splitfield Zeiss microscope.
CategoryLithography - MaskABM
ABM Mask Aligner is a lithography mask aligner described with wafer sizes from 2 to 12 inches and a 1000 Watt DUV light source.
CategoryLithography
