2 entries
- EvoVacAngstrom Engineering
The Angstrom Engineering EvoVac is a load-locked PVD tool for electron-beam evaporation, with additional resistive thermal evaporation, ion-assisted deposition, and sputter deposition capabilities.
CategoryDepositionWafer6 in - NexDepAngstrom Engineering
The Angstrom NexDep Thermal E-Beam Evaporator is a physical vapor deposition tool that offers e-beam and thermal evaporation, with NexDep 2 also offering ion assisted deposition.
CategoryDeposition
